National Repository of Grey Literature 3 records found  Search took 0.00 seconds. 
SMV-2012-12: Testing specimens for SEM
Matějka, Milan ; Kolařík, Vladimír ; Urbánek, Michal ; Krátký, Stanislav ; Chlumská, Jana ; Horáček, Miroslav ; Král, Stanislav
Research and development in the field of relief testing structures on Silicon wafer. The specimen is to be used for testing of metrics of scanning electron microscopes (SEM) as well as for the calibration of the SEM view of field. The samples are prepared by means of electron-beam lithography and related techniques.
Testing specimens for SEM
Kolařík, Vladimír ; Matějka, Milan ; Urbánek, Michal ; Krátký, Stanislav ; Chlumská, Jana ; Horáček, Miroslav ; Král, Stanislav
Research and development in the field of relief testing structures on Silicon wafer. The specimen is to be used for testing of metrics (dimensions and orthogonality) of scanning electron microscopes (SEM) as well as for the calibration of the SEM view of field. A set of samples is prepared on a Silicon wafer by means of electron-beam lithography and related techniques. The specimens are individually finalized. Related research and development in the field of accuracy assessment and control as well as tolerance measurements in the micron domain; Calibration Certificate.
Institute of Scientific Instruments: An Overview Presenatation
Kolařík, Vladimír ; Zobač, Martin ; Fořt, Tomáš ; Vlček, Ivan ; Dupák, Libor ; Mikmeková, Šárka ; Mikmeková, Eliška ; Mrňa, Libor ; Horáček, Miroslav ; Sobota, Jaroslav
The aim of this contribution is to present the Institute of Scientific Instrument of the Academy of Sciences of the Czech Republic, mainly from the potential of applied research viewpoint. It covers mainly the six application fields including material study of metals and alloys, nano layer residual stress observation methods, 2 kW fibre laser, impact testing of hard coatings, e-beam welding, machining and engraving, and finally e-beam lithography. Recently achieved results as well as the new application potential are presented. Furthermore, each topic is assumed to have a separate presentation prepared in more details within this event. A brief overview follows. Scanning low energy electron microscopy (SLEEM) is increasingly becoming recognized as a valuable analytical tool in the field of materials science. The SLEEM is also used for observation of compressive stress in nano layers that leads to wrinkling and film delamination. Using the fibre laser, we can offer 3D laser welding and cutting of various type of materials and laser surface hardening too. For the hard coatings testing and evaluation of their impact resistance a new method was suggested (Dynamic Impact Wear Test). During testing the specimen is cyclically loaded by tungsten carbide ball that impacts of the coating/substrate surface. In house e-beam welding machine allows for welding, machining, engraving and other utilizations of intense electron beam. The group of micro lithography is able to prepare micro and nano structures in thin layers of metals and other materials; including the characterization of the realized structures

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